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Imaging of topographical features and chemical phase differences, with elemental analysis

SEM-EDX can be used to provide surface elemental composition information of areas as small as nanometers in diameter. A finely tuned electron beam scans the sample and monitors the reflected electrons from the sample surface. The impact of the electron beam produces x-rays that are characteristic of the elements in the sample. SEM-EDX is also capable of analyzing multiple spots to create elemental maps of the surface of a sample, which can indicate materials present in either broad phases, or as small localized impurities. SEM-EDX detects all the elements from B to U, with detection limits of 1000 – 3000 ppm, depth resolution of 0.5-3um, and a probe size of 15-45 Å.

  • Identification of surface elemental composition
  • Thin films analysis
  • Examination of surface morphology
  • Particle contamination identification
  • Identification of trace impurity spots

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